Prediction of Removal Rates in Chemical–Mechanical Polishing (CMP) Using Tribocorrosion Modeling
نویسندگان
چکیده
منابع مشابه
A statistical model for material removal prediction in polishing
This paper develops analytically a statistical model for predicting the material removal in mechanical polishing of material surfaces (MS). The model was based on the statistical theory and the abrasive–MS contact mechanisms. The pad-MS and pad-abrasive-MS interactions in polishing were characterised by contact mechanics. Two types of active abrasive particles in the polishing system were consi...
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ژورنال
عنوان ژورنال: Journal of Bio- and Tribo-Corrosion
سال: 2016
ISSN: 2198-4220,2198-4239
DOI: 10.1007/s40735-016-0041-4